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Influence of Hydrogen Dilution on Properties of Silicon Films Prepared by D.C. Saddle-Field Glow-Discharge: Observation of Microcrystallinity

Published online by Cambridge University Press:  01 February 2011

T. Allen ,
I. Milostnaya ,
D. Yeghikyan ,
K. Leong ,
F. Gaspari ,
N.P. Kherani ,
T. Kosteski  and
S. Zukotynski
T. Allen
Affiliation:
Department of Physics, Geology and Astronomy, University of Tennessee at Chattanooga, Chattanooga, TN 37403U.S.A
I. Milostnaya
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, CANADA, M5S 1A4
D. Yeghikyan
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, CANADA, M5S 1A4
K. Leong
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, CANADA, M5S 1A4
F. Gaspari
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, CANADA, M5S 1A4
N.P. Kherani
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, CANADA, M5S 1A4
T. Kosteski
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, CANADA, M5S 1A4
S. Zukotynski
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, CANADA, M5S 1A4
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Abstract

In the D.C. saddle field glow discharge deposition the transition from amorphous to microcrystalline silicon thin films occurs when the silane concentration in the gas phase drops below 10%. We report here the results of Raman spectroscopy, SEM, TEM, and HRTEM studies of the film morphology. We estimate the average crystallite size to be in the range of 5 to 7 nm and the crystalline volume fraction of 25 to 35%.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 762: Symposium A – Amorphous and Nanocrystalline Silicon-Based Films – 2003 , 2003 , A6.10
Copyright
Copyright © Materials Research Society 2003

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