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Improve the Accuracy of Scanning Kelvin Probe Microscopy by Eliminating the Cantilever Effect

Published online by Cambridge University Press:  01 February 2011

Zhitao Yang  and
Michael G. Spencer
Zhitao Yang
Affiliation:
School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14850, U.S.A.
Michael G. Spencer
Affiliation:
School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14850, U.S.A.
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Abstract

Scanning Kelvin probe microscopy (SKPM) is widely used to measure surface work functions and electrostatic potentials on nanoscale circuits, devices and materials. However, the accuracy of scanning Kelvin probe microscopy is reduced by a cantilever effect, which is due to a large capacitance gradient associated with the cantilever. We introduce an aperture structure to quantitatively moderate the strength of the cantilever effect. In this approach, the cantilever effect is eliminated and the true surface potential can be extracted by solving a set of linear equations. Experimental results show that this approach yields very accurate surface potentials when there is only a single potential source within the aperture. In the case of multiple potential sources, this method significantly improves accuracy as well. A mobile aperture structure mounted on a micromanipulator can make this approach more versatile.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 838: Symposium O – Scanning Probe and Other Novel Microscopies of Local Phenomena in Nanostructured Materials , 2004 , O11.7
Copyright
Copyright © Materials Research Society 2005

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References

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