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i-CxSiyOzHw Films Formed by Ion Beam Assisted Deposition

Published online by Cambridge University Press:  25 February 2011

C. G. Fountzoulas ,
J. D. Demaree ,
W. E. Kosik ,
W. Franzen ,
W. Croft  and
J. K. Hirvonen
C. G. Fountzoulas
Affiliation:
U. S. Army Research Laboratory, Materials Directorate, Metals Research Branch, Watertown, MA 02172–0001
J. D. Demaree
Affiliation:
U. S. Army Research Laboratory, Materials Directorate, Metals Research Branch, Watertown, MA 02172–0001
W. E. Kosik
Affiliation:
U. S. Army Research Laboratory, Materials Directorate, Metals Research Branch, Watertown, MA 02172–0001
W. Franzen
Affiliation:
U. S. Army Research Laboratory, Materials Directorate, Metals Research Branch, Watertown, MA 02172–0001
W. Croft
Affiliation:
U. S. Army Research Laboratory, Materials Directorate, Metals Research Branch, Watertown, MA 02172–0001
J. K. Hirvonen
Affiliation:
U. S. Army Research Laboratory, Materials Directorate, Metals Research Branch, Watertown, MA 02172–0001
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Abstract

i-CxSiyOzHw films were formed by thermal evaporation of a tetraphenyl-tetramethyl-trisiloxane diffusion pump oil onto silicon and steel substrates with simultaneous bombardment of the growing film with 40 keV Ar+ ions to decompose the (C6H5)4(CH3)4Si3O2 molecules. Both the current density of the ion beam and the oil arrival rate were varied to produce hard, adhesive films on room temperature substrates, with densities ranging from 1.4 to 2.3 g/cm3 and Knoop microhardness values (at 15 g load) from 1000 to 2100. Unlubricated friction coefficients against a 440C steel ball with a 50 g load ranged from 0.03 to 0.40, depending on deposition conditions, and all films were more wear-resistant than the substrate materials. The films were examined with RBS, hydrogen forward recoil scattering, SEM, TEM, photon tunneling microscopy, electron diffraction, and ellipsometry to ascertain and correlate their chemical compositions and microstructures with their mechanical/chemical properties (microhardness, adhesion, friction and wear).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 279: Symposium A – Beam-Solid Interactions–Fundamentals and Applications , 1992 , 645
Copyright
Copyright © Materials Research Society 1993

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