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Hyperacuity Image Sensors

Published online by Cambridge University Press:  15 February 2011

David K. Biegelsen ,
Warren B. Jackson ,
René Lujan ,
David Jared  and
Richard L. Weisfield
David K. Biegelsen
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
Warren B. Jackson
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
René Lujan
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
David Jared
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
Richard L. Weisfield
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
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Abstract

The human visual system perceives much smaller spatial steps in edges between high contrast regions than equivalents fine, periodic features. This characteristic is known as hyperacuity. We have designed, simulated, fabricated and characterized amorphous silicon sensors which provide hyperacuity information. The individual pixels are position sensitive detectors, the outputs of which provide the x and y first moments of the cell illumination pattern as well as the average gray level. In the simplest case the top electrode of a standard p-i-n diode sensor is replaced by four edge strip electrodes. Both quadrilateral cells (having all four lateral electrodes on the same side of the p-i-n diode) and duolateral cells (having x-electrodes on top and y-electrodes on bottom) have been tested. Results of probing the cells with rastered spots show that both types provide usable linearity and sensitivity. The duolateral structure provides greater orthogonality of the x and y information. One μm spatial resolution can be achieved with devices compatible with standard amorphous silicon sensor processing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 377: Symposium A – Amorphous Silicon Technology 1995 , 1995 , 833
Copyright
Copyright © Materials Research Society 1995

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References

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