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Hydrothermal Preparation of Ba(Ti,Zr)O3 Thin Films From Ti-Zr Metallic Alloys on Silicon Substrate

Published online by Cambridge University Press:  10 February 2011

Chang-Tai Xia ,
V. M. Fuenzalida  and
R. A. Zarate
Chang-Tai Xia
Affiliation:
Universidad de Chile, Facultad de Ciencias Físicas y Matemáticas Departamento de Física, Casilla 487-3, Santiago, Chile.cxia@cec.uchile.cl
V. M. Fuenzalida
Affiliation:
Universidad de Chile, Facultad de Ciencias Físicas y Matemáticas Departamento de Física, Casilla 487-3, Santiago
R. A. Zarate
Affiliation:
Universidad de Chile, Facultad de Ciencias Físicas y Matemáticas Departamento de Física, Casilla 487-3, Santiago
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Abstract

Ba(Ti,Zr)O3 thin films were grown hydrothermally on silicon substrates coated with sputtered a Ti-34 at.%Zr metallic alloy thin film. To ensure the formation of Ba(Ti,Zr)O3 under the hydrothermal conditions at 150°C, the concentration of the Ba(OH)2 had to be greater than 0.25 M. Preliminary capacitance measurement revealed a dielectric constant of 200 in Ba(Ti,Zr)O3 films of approximately 320 nm. The formation mechanism is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 623: Symposium U – Materials Science of Novel Oxide-Based Electronics , 2000 , 179
Copyright
Copyright © Materials Research Society 2000

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References

1 Auciello, O., Scott, J. F., and Ramesh, R., Physics Today 51, 22 (1998).Google Scholar
2 Scott, J. F. and Araujo, C. A. Paz de, Science 246, 1400 (1989).Google Scholar
3 Haertling, G. H., J. Am. Ceram. Soc. 82, 797 (1999).Google Scholar
4 Hoffmnann, S. and Waser, R. M., Integrated Ferroelectrics 17, 141 (1997)Google Scholar
5 Yoshimura, M., Yoo, S.-E., Hayashi, M., and Ishizawa, N., Jpn. J. Appl. Phys. 28, L2007 (1989).Google Scholar
6 Ishizawa, N., Banno, H., Hayashi, M., Yoo, S.-E., and Yoshimura, M., Jpn. J. App. Phys. 29, 2467 (1990).Google Scholar
7 Pilleux, M. E., Grahmann, C. R., and Fuenzalida, V. M., Appl. Surf Sci. 65/66, 283 (1993).Google Scholar
8 Fuenzalida, V. M. and Pilleux, M. E., J. Mater. Res. 10, 2749 (1995).Google Scholar
9 Chien, A. T., Speck, J. S., and Lange, F. F., J. Mater. Res. 12, 1176 (1997).Google Scholar
10 Ishizawa, H. and Ogino, M., J. Mater. Sci. 31, 6279 (1996).Google Scholar
11 Bendale, P., Venigalla, S., Ambrose, J. R., Verink, E. D. Jr, and Adair, J. H., J. Am. Ceram. Soc. 76, 2619 (1993).Google Scholar
12 Slamovich, E. B. and Aksay, I. A., J. Am. Ceram. Soc. 79, 239 (1996).Google Scholar
13 Hoffmnann, T., Doll, T., and Fuenzalida, V. M., J. Electrochem. Soc. 144, L292 (1997).Google Scholar
14 Alvarez, A. V. and Fuenzalida, V. M., J. Mater. Res. 14, 4136 (1999).Google Scholar
15 Lencka, M. M. and Riman, R. E., Chem. Mater. 5, 61 (1993).Google Scholar
16 Slamovich, E. B. and Aksay, I. A., J. Am. Ceram. Soc. 79, 239 (1996).Google Scholar
17 Galsater, H., pH Measurement, VCH, Weinbeim, Germany, 1991.Google Scholar
18 Dawson, W. J., Am. Ceram. Soc. Bull. 67, 1673 (1988).Google Scholar
19 Xia, C.-T., Shi, E.-W., Zhong, W.-Z., and Guo, J.K., J. Eur. Ceram. Soc. 15, 1171 (1995).Google Scholar
20 Xia, C.-T., Fuenzalida, V. M., and Zarate, R. A., unpublished results.Google Scholar
21 Xia, C.-T., Shi, E.-W., Zhong, W.-Z., and Guo, J.-K., Chin. Sci. Bull. 40, 2002 (1995).Google Scholar
22 Lisoni, J. G., Piera, F. J., Sánchez, M., Soto, C. F., and Fuenzalida, V. M., Appl. Surf Sci. 134, 225 (1998).Google Scholar
23 Bacsa, R. R., Dougherty, J. R., and Pilione, L. J., Appl. Phys. Lett. 63, 1053 (1993).Google Scholar
24 Kajiyoshi, K., Sakabe, Y., and Yoshimura, M., Jpn. J. Appl. Phys. 36, 1209 (1997).Google Scholar
25 Chien, A. T., Xu, X., Kim, J. H., Sachleben, J., Speck, J. S., and Lange, F. F., J. Mater. Res. 14, 3330 (1999).Google Scholar
26 Young, L., Anodic Oxide Films (Academic Press, New York, 1961), p. 253–57.Google Scholar
27 Prusi, A. R. and Arsov, L. D., Corros. Sci. 33, 153 (1992).Google Scholar
28 Pourbaix, M., Atlas of Electrochemical Equilibria in Aqueous Solutions, 2nd ed.(National Association of Corrosion Engineers, Houston, TX, 1974), p. 213–29.Google Scholar
29 Hertl, W., J. Am. Ceram. Soc. 71, 879 (1988).Google Scholar
30 Chien, A. T., Speck, J. S., and Lange, F. F., Daykin, A. C., and Levi, C. G., J. Mater. Res. 10, 1784 (1995).Google Scholar