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Published online by Cambridge University Press: 27 February 2014
Interest in patterned polymer-based flexible nanodevices and sub-100 nm metal and transparent conducting nanostructured electrodes have led us to modify the traditional nanoimprint lithography technique to enable fabrication of an array of sub-100 nm diameter electrode structures. Transparent conducting electrodes (TCOs) are fabricated by coating one or multiple TCO layers of choice on top of a polymer nanostructured scaffold of appropriate dimension. By optimizing the thickness of each of these layers one may tune and optimize the trade-off between the conductivity and transparency of the sample. Incorporation of plasmonic materials such as Ag leads to interplay of localized and tunable surface plasmon resonances within the TCO structures. At plasmon resonance the reflection of the sample is minimized and absorption in the TCO structures dominates. Experimental and simulated reflection spectra of these structures are in good agreement, including the appearance of sharp spectral features that are absent in a simple planar analog. The simulated Brewster angle of the nanopillars decreases compared to the planar reference sample by up to 10-13 degrees depending on the height of the pillars and indicates a reduced effective refractive index. The depolarization factor obtained by ellipsometry is about 0.05, as anticipated for ellipsoidal pillars.