Hostname: page-component-7c8c6479df-995ml Total loading time: 0 Render date: 2024-03-28T20:20:25.304Z Has data issue: false hasContentIssue false

Growth of InSb on GaAs Substrates Using InAlSb Buffers for Magnetic Field Sensor Applications

Published online by Cambridge University Press:  10 February 2011

R. M. Biefeld
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0601
J. D. Phillips
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0601
Get access

Abstract

We report the growth of InSb on GaAs using InAISb buffers of high interest for magnetic field sensors. We have grown samples by metal-organic chemical vapor deposition consisting of ∼0.55µm thick InSb layers with resistive InAlSb buffers on GaAs substrates with measured electron mobilities of ∼40,000 cm2/V.s. We have investigated the In1−xAlxSb buffers for compositions x≤0.22 and have found that the best results are obtained near x=0.12 due to the tradeoff of buffer layer bandgap and lattice mismatch.

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Heremans, J., Partin, D. L., Thrush, C. M., and Green, L, Semicond. Sci. Technol. 8 (1993) S424.Google Scholar
2. Biefeld, R. M. and Hebner, G. A., J. Crystal Growth 109 (1991) 272.Google Scholar
3. McKee, M. A., Yoo, B. S., and Stall, R. A., J. Crystal Growth 124 (1992) 286.Google Scholar
4. Partin, D. L., Green, L., and Heremans, J., J. Electronic Materials 23 (1994) 75.Google Scholar
5.http://www.emcore.com/devices/pegasus.htmlGoogle Scholar
6. Partin, D. L., Heremans, J., and Thrush, C. M., J. Vac. Sci. Technol. B 17 (1999) 1267.Google Scholar
7. Biefeld, R. M., Allerman, A. A., and Baucom, K. C., J. Electronic Materials 27 (1998) L43.Google Scholar
8. Baucom, K. C. and Biefeld, R. M., Appl. Phys. Lett. 64 (1994) 3021.Google Scholar
9. Partin, D. L., Pelczynski, M., Cooke, P., Green, L., Heremans, J., and Thrush, C. M., J. Crystal Growth 195 (1998) 378.Google Scholar
[10] Breiland, W., Ho, H., Chui, H., and Hammons, B., J. Crystal Growth 174 (1997) 564.Google Scholar