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Growth of Antimony Thin Films Using Perbenzylated Organometallic Precursors

Published online by Cambridge University Press:  16 February 2011

Michael P. Remington Jr. ,
Smuruthi Kamepalli ,
Philip Boudjouk ,
Bryan R. Jarabek ,
Dean G. Grier ,
Ryan S. Winburn ,
Brian E. Very  and
Gregory J. McCarthy
Michael P. Remington Jr.
Affiliation:
Center for Main Group Chemistry, Department of Chemistry, North Dakota State University, Fargo, North Dakota 58105
Smuruthi Kamepalli
Affiliation:
Center for Main Group Chemistry, Department of Chemistry, North Dakota State University, Fargo, North Dakota 58105
Philip Boudjouk
Affiliation:
Center for Main Group Chemistry, Department of Chemistry, North Dakota State University, Fargo, North Dakota 58105
Bryan R. Jarabek
Affiliation:
Center for Main Group Chemistry, Department of Chemistry, North Dakota State University, Fargo, North Dakota 58105
Dean G. Grier
Affiliation:
Center for Main Group Chemistry, Department of Chemistry, North Dakota State University, Fargo, North Dakota 58105
Ryan S. Winburn
Affiliation:
Center for Main Group Chemistry, Department of Chemistry, North Dakota State University, Fargo, North Dakota 58105
Brian E. Very
Affiliation:
Center for Main Group Chemistry, Department of Chemistry, North Dakota State University, Fargo, North Dakota 58105
Gregory J. McCarthy
Affiliation:
Center for Main Group Chemistry, Department of Chemistry, North Dakota State University, Fargo, North Dakota 58105
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Abstract

The low temperature (ca. 300°C) deposition of antimony films by low-pressure chemical vapor deposition (LPCVD) on glass substrates from tribenzylantimony, Bn3Sb, is described. The facile elimination of the benzyl ligands results in preferentially oriented antimony films with low carbon content. The pyrolysis, decomposition mechanism and precursor design strategies are discussed. In addition, the deposition of bismuth from tribenzylbismuth, Bn3Bi, is presented. The potential for alloy growth using these precursors is discussed. Resulting films were characterized by XRD, SEM, and AFM.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 547: Symposium DD – Solid-State Chemistry of Inorganic Materials II , 1998 , 481
Copyright
Copyright © Materials Research Society 1999

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