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Glancing Angle EXAFS Studies of Tungsten-Carbon Multilayers

Published online by Cambridge University Press:  25 February 2011

G. M. Lamble ,
S. M. Heald ,
D. E. Sayers  and
D E. Ziegler
G. M. Lamble
Affiliation:
North Carolina State University, Raleigh, NC 27607
S. M. Heald
Affiliation:
Brookhaven National Laboratory, Department of Applied Science, Upton, NY 11973
D. E. Sayers
Affiliation:
North Carolina State University, Raleigh, NC 27607
D E. Ziegler
Affiliation:
Materials Science and Technology Division, Argonne National Laboratory, Argonne, IL 60439.
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Abstract

Results are presented from glancing angle EXAFS studies of three tungsten-carbon multilayer systems, of different W/C thickness ratios, by monitoring the fine structure above the tungsten L3-edge. The purpose of the investigations was to determine the structural changes occurring in the multilayer as a result of moderate annealing. Surprisingly, dramatic changes are observed in the structural environment of the W atoms as a result of heating to temperatures as low as 350°C for 3 hours. It is found that, when the W layer is sufficiently thick, and the W/C layer thickness favorable, W2C is preferentially formed and crystallization is extensive.

The experiment demonstrates the suitablility of the EXAFS technique for the study of multilayer systems since, 1) contribution to the signal from the interface is significant and 2) the phenomenon is not dependent on the existence of long range order.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 103 , 1987 , 101
Copyright
Copyright © Materials Research Society 1988

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References

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