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Gas Phase Interactions between Triethylindium and Trimethylgallium

Published online by Cambridge University Press:  25 February 2011

P. D. Agnello  and
S. K. Ghandhi
P. D. Agnello
Affiliation:
Electrical, Computer and Systems Engineering Department, Rensselaer Polytechnic Institute, Troy, NY. 12180
S. K. Ghandhi
Affiliation:
Electrical, Computer and Systems Engineering Department, Rensselaer Polytechnic Institute, Troy, NY. 12180
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Abstract

A study of the room temperature gas-phase interactions between gallium and indium alkyls was undertaken using a mass spectrometer sampling system, mounted on a low pressure organometallic vapor phase epitaxial reactor. Mixtures of triethylindium with triethylgallium or trimethylgallium were investigated. Both combinations formed addition compounds; moreover, the triethylindium-trimethylgallium mixture underwent alkyl exchange. Both admixtures showed reduced reactivity towards arsine. A structure for the addition compound is proposed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 131: Symposium E – Chemical Perspectives of Microelectronic Materials I , 1988 , 97
Copyright
Copyright © Materials Research Society 1989

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References

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