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Fabrication of Periodic Arrays of Nanoscale Square Helices

Published online by Cambridge University Press:  01 February 2011

Martin O. Jensen ,
Scott R. Kennedy  and
Michael J. Brett
Martin O. Jensen
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2V4
Scott R. Kennedy
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2V4
Michael J. Brett
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2V4
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Abstract

We demonstrate fabrication of periodic arrays of nanometre scale square helices, with potential applications in three-dimensional photonic bandgap (PBG) materials. Processing is performed using a thin film deposition method known as Glancing Angle Deposition (GLAD). Through advanced substrate motion, this technique allows for controlled growth of square helices in a variety of inorganic materials. Organization of the helices into periodic twodimensional geometries is achieved by prepatterning the substrate surface using electron beam lithography. The regular turns of the helices yield periodicity in the third dimension, perpendicular to the substrate. We present studies of tetragonal and trigonal arrays of silicon helices, with lattice constants as low as 300 nm. By deliberately adding or leaving out seeds in the substrate pattern, we have succeeded in engineering line defects. Our periodic nanoscale structure closely matches an ideal photonic band gap architecture, as recently proposed by Toader and John. While our fabrication technique is simpler than most suggested PBG schemes, it is highly versatile. A wide range of materials can be used for GLAD, manipulation of lattice constant and helix pitch ensures optical tunability, and the GLAD films are robust to micromachining.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 728: Symposium S – Functional Nanostructured Materials through Multiscale Assembly and Novel Patterning Techniques , 2002 , S9.10
Copyright
Copyright © Materials Research Society 2002

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