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Fabrication of Micron Scale Magnetic Nickel Features by Selective Area Organometallic Chemical Vapor Deposition

Published online by Cambridge University Press:  10 February 2011

D. Welipitiya ,
C. N. Borca ,
P. A. Dowben ,
I. Gobulukoglu ,
Hong Jiang ,
B. W. Robertson  and
Jiandi Zhang
D. Welipitiya
Affiliation:
Department of Physics & Astronomy and the Center for Materials Research and Analysis, University of Nebraska, Lincoln, Nebraska 68588–0111
C. N. Borca
Affiliation:
Department of Physics & Astronomy and the Center for Materials Research and Analysis, University of Nebraska, Lincoln, Nebraska 68588–0111
P. A. Dowben
Affiliation:
Department of Physics & Astronomy and the Center for Materials Research and Analysis, University of Nebraska, Lincoln, Nebraska 68588–0111
I. Gobulukoglu
Affiliation:
Department of Mechanical Engineering and the Center for Materials Research and Analysis, University of Nebraska, Lincoln, Nebraska 68588–0656
Hong Jiang
Affiliation:
Department of Mechanical Engineering and the Center for Materials Research and Analysis, University of Nebraska, Lincoln, Nebraska 68588–0656
B. W. Robertson
Affiliation:
Department of Mechanical Engineering and the Center for Materials Research and Analysis, University of Nebraska, Lincoln, Nebraska 68588–0656
Jiandi Zhang
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
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Abstract

We demonstrate that it is possible to deposit a wide range of magnetic features, using photoassisted and electron radiation induced selective area organometallic chemical vapor deposition. Large arrays of identical micron to nano scale Ni features were deposited by these methods. Their magnetic properties were studied by alternating gradient force magnetometry as well as magnetic force microscopy. Our morphological and magnetic measurements show that the structures are spatially well defined, and the magnetic properties are related to the structural shapes of the features.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 475: Symposium M – Magnetic Ultrathin Films, Multilayers, and Surfaces – 1997 , 1997 , 257
Copyright
Copyright © Materials Research Society 1997

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References

REFERENCES

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