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Exotic Doping for Zno Thin Films: Possibility of Monolithic Optical Integrated Circuit

Published online by Cambridge University Press:  10 February 2011

Norifumi Fujimura ,
Tamaki Shimura ,
Toshifumi Wakano ,
Atsushi Ashida  and
Taichiro Ito
Norifumi Fujimura
Affiliation:
College of Eng., Dept. of Applied Materials Science, Osaka Prefecture University, [1] Gakuen-cho, Sakai Osaka 599–8531, Japanfujim@ams.osakafu-u.ac.jp
Tamaki Shimura
Affiliation:
College of Eng., Dept. of Applied Materials Science, Osaka Prefecture University, [1] Gakuen-cho, Sakai Osaka 599–8531, Japanfujim@ams.osakafu-u.ac.jp
Toshifumi Wakano
Affiliation:
College of Eng., Dept. of Applied Materials Science, Osaka Prefecture University, [1] Gakuen-cho, Sakai Osaka 599–8531, Japanfujim@ams.osakafu-u.ac.jp
Atsushi Ashida
Affiliation:
College of Eng., Dept. of Applied Materials Science, Osaka Prefecture University, [1] Gakuen-cho, Sakai Osaka 599–8531, Japanfujim@ams.osakafu-u.ac.jp
Taichiro Ito
Affiliation:
College of Eng., Dept. of Applied Materials Science, Osaka Prefecture University, [1] Gakuen-cho, Sakai Osaka 599–8531, Japanfujim@ams.osakafu-u.ac.jp
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Abstract

We propose the application of ZnO:X (X = Li, Mg, N, In, Al, Mn, Gd, Yb etc.) films for a monolithic Optical Integrated Circuit (OIC). Since ZnO exhibits excellent piezoelectric effect and has also electro-optic and nonlinear optic effects and the thin films are easily obtained, it has been studied as one of the important thin film wave guide materials especially for an acoustooptic device[1]. In terms of electro-optic and nonlinear optic effects, however, LiNbO3 or LiTaO3 is superior to ZnO. The most important issue of thin film waveguide using such ferroelectrics is optical losses at the film/substrate interface and the film surface, because the process window to control the surface morphology is very narrow due to their high deposition temperature. Since ZnO can be grown at extremely low temperature, the roughness at the surface and the interface is expected to be minimized. This is the absolute requirement especially for waveguide using a blue or ultraviolet laser. Recently, lasing at the wavelength of ultraviolet, ferroelectric and antiferromagnetic behaviors of ZnO doped with various exotic elements (exotic doping) have been reported. This paper discusses the OIC application of ZnO thin films doped with exotic elements.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 574: Symposia BB – Multicomponent Oxide Films for Electronics , 1999 , 317
Copyright
Copyright © Materials Research Society 1999

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References

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