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Electrical Detection of Oscillations in Micro- and Nano- Cantilevers Using Harmonic Detection of Resonance

Published online by Cambridge University Press:  01 February 2011

J. Gaillard ,
Razvan Ciocan ,
Malcolm J. Skove  and
Apparao M. Rao
J. Gaillard
Affiliation:
jgailla@clemson.edu, Clemson University, 118 Kinard Hall, Clemson, SC, 29634, United States, 864-656-4447, 864-656-0805
Razvan Ciocan
Affiliation:
ciocan@clemson.edu, Clemson University, Physics and Astronomy, United States
Malcolm J. Skove
Affiliation:
mskove@clemson.edu, Clemson University, Physics and Astronomy, United States
Apparao M. Rao
Affiliation:
arao@clemson.edu, Clemson University, Physics and Astronomy, United States
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Abstract

Accurate determination of the resonant frequency, phase and quality factor in micro and nano-mechanical oscillators permits the detection of: (i) trace amounts of specific adsorbed molecules which affect the resonant frequency; (ii) pressure variations which affect the mechanical damping of the oscillator; or (iii) the temperature dependence of the elastic properties of the oscillator through a shift in the resonant frequency. To date, electrical detection of oscillations in cantilevered multiwalled carbon nanotubes (MWNTs) has eluded researchers in the field. Electrical detection allows a simple means for measuring the resonance frequency, phase and quality factor of cantilevers built into integrated circuits, or cantilevers whose response can be monitored as a function of any external parameter such as temperature or pressure. To this end, we described a fully electrical (actuation and detection) method termed harmonic detection of resonance (HDR) to measure mechanical oscillations in ambient conditions for two systems: Si-based micro- and MWNT based nano-cantilevers. Furthermore, we demonstrate that the resonant frequency in micro- and nano-cantilevers can be tuned without appreciable change in the quality factor which suggests that HDR is an ideal platform in device design and applications.

Keywords

microelectro-mechanical (MEMS)nanoscaleelastic properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 888: Symposium V – Materials and Devices for Smart Systems II , 2005 , 0888-V02-03
Copyright
Copyright © Materials Research Society 2006

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References

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