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The Elastic, Plastic, and Time Dependent Properties of thin Films as Determined by Ultra low Load Indentation

Published online by Cambridge University Press:  22 February 2011

B. N. Lucas  and
W. C. Oliver
B. N. Lucas
Affiliation:
Oak Ridge National Laboratory, Metals and Ceramics Division, Oak Ridge, TN 37831–6116
W. C. Oliver
Affiliation:
Oak Ridge National Laboratory, Metals and Ceramics Division, Oak Ridge, TN 37831–6116
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Abstract

Using a highly spatially resolved mechanical properties microprobe, the elastic, plastic and time dependent mechanical properties of sapphire and a 1.9 μm amorphous alumina film on a sapphire substrate have been studied. Young's modulus, hardness, and stress-exponent data are reported. The technique for characterizing time dependent properties via indentation (hardness versus displacement rate/displacement) are directly compared to standard uniaxial compressive techniques (stress vs strain rate) for a bulk Pb-In alloy to further quantify the relationships between the two techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 239: Symposium D – Thin Films: Stresses and Mechanical Properties III , 1991 , 337
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. Pitts, E., J. Phys. D: Appl. Phys 3, 1803 (1970).CrossRefGoogle Scholar
2. Shorshorev, M. Kh., Bulychev, S. I., Alekhin, V. P., Sov. Phys. Doklady 26, 769 (1981).Google Scholar
3. Doerner, M. F. and Nix, W. D., J. Mater. Res. 1, 601 (1986).CrossRefGoogle Scholar
4. Oliver, W. C., McHargue, C. J., and Zinkle, S. J., Thin Solid Films 153, 185 (1987).CrossRefGoogle Scholar
5. Pethica, J. B. and Oliver, W. C., Mat. Res. Soc. Sym. Proc. 130, Eds. Bravman, J. C. et al. (MRS Pittsburgh, 1989), 13.Google Scholar
6. Mayo, M. J. and Nix, W. D., Acta Metall. 6, 2183 (1988).CrossRefGoogle Scholar
7. Mayo, M. J., Siegal, R. W., Narayanasamy, A. and Nix, W. D., J. Mater. Res. 5, 1073 (1990).CrossRefGoogle Scholar
8. Mayo, M. J. and Nix, W. D., 8th Int. Conf. Strength of Metals and Alloys (ICSMA -8), Tempere, Finland, 22–26 August, 1988.Google Scholar
9. Tabor, D., The Hardness of Metals. 1951: Oxford (Clarendon Press).Google Scholar
10. Oliver, W. C. and Pharr, G. M., in preparation for J. Mater. Research.Google Scholar
11. Wei, J. C, PhD dissertation, Stanford University, 1980.Google Scholar
12. Atkins, A. G., Silverio, A., and Tabor, D., J. Inst. Metals 94, 369 (1966).Google Scholar