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Effects of Platinum Electrode Structures on Crystallinity and Electrical Properties of Mod-Prepared Pzt Capacitors

Published online by Cambridge University Press:  21 February 2011

Dennis J. Eichorst
Affiliation:
Eastman Kodak Company, Research Laboratories, Rochester, NY 14650-2011
Cynthia J. Baron
Affiliation:
Eastman Kodak Company, Research Laboratories, Rochester, NY 14650-2011
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Abstract

The most common electrode structure for lead zirconium titanate (PZT) integrated on Si is platinum with a Ti adhesion layer. However, platinum hillocks that can lead to sample shorting may form during annealing. Careful selection of the Pt/Ti electrode architecture and deposition conditions can give nearly hillock-free electrodes. The phase development and ferroelectric properties of PZT prepared by metallo-organic decomposition (MOD) were studied as a function of Pt electrode structure and PZT composition. In addition to evaporated or sputtered Pt/Ti electrodes, Pt electrode layers were also prepared by MOD. MOD Pt layers showed no hillock formation but generally resulted in greater pyrochlore content in PZT capacitors.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

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