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Effect of Dynamic Bias Stress (AC) In Short-Channel (L=1.5μm) p-Type polycrystalline Silicon (poly-Si) Thin Film Transistors (TFTs) on the glass substrate

Published online by Cambridge University Press:  20 June 2011

Sung-Hwan Choi ,
Yeon-Gon Mo  and
Min-Koo Han
Sung-Hwan Choi
Affiliation:
School of Electrical Engineering and Computer Science, Seoul National University, 599 Gwanangno, Gwanak-gu, Seoul, 151-744, Korea.
Yeon-Gon Mo
Affiliation:
Corporate R&D Center, Samsung Mobile Display Co. Ltd., Yongin-City, Kyeonggi-do, Korea.
Min-Koo Han
Affiliation:
School of Electrical Engineering and Computer Science, Seoul National University, 599 Gwanangno, Gwanak-gu, Seoul, 151-744, Korea.
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Abstract

We have investigated the stability of short channel (1.5μm) p-Type polycrystalline silicon (poly-Si) Thin Film Transistors (TFTs) on the glass substrate under AC bias stress. The variation of threshold voltage in short channel poly-Si TFT was considerably higher than that of long channel poly-Si TFT. Threshold voltage of the short channel TFT was considerably moved to the positive direction during AC bias stress, whereas the threshold voltage of a long channel was rarely moved. The variation of threshold voltage in the short channel p-type TFT under AC bias stess was more compared to that under DC bias stress. The threshold voltage of short channel (L=1.5μm) poly-Si TFT was increased about -7.44V from -0.305V to -7.745V when VGS = 5 (base value) ~ -15V (peak value), VDS = -15V was applied for 3,000 seconds. This positive shift of threshold voltage and significantly degraded s-swing value in the short channel TFT under dynamic stress (AC) may be due to the increase of the stress-induced trap state density at gate insulator / channel interface region.

Keywords

thin filmSipolycrystal
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1321: Symposium A – Amorphous and Polycrystalline Thin-Film Silicon Science and Technology , 2011 , mrss11-1321-a09-03
Copyright
Copyright © Materials Research Society 2011

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References

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