Hostname: page-component-7bb8b95d7b-qxsvm Total loading time: 0 Render date: 2024-09-24T12:39:27.670Z Has data issue: false hasContentIssue false
  • English
  • Français

Diffusion and Solubility of Hydrogen in Amorphous and Microcrystalline Si:H Films

Published online by Cambridge University Press:  17 March 2011

Wolfhard Beyer
Wolfhard Beyer*
Affiliation:
Institut für Photovoltaik, Forschungszentrum Jülich, D-52425 Jülich, Germany
Get access

Abstract

Hydrogen diffusion and solubility effects in hydrogenated amorphous and microcrystalline silicon films are reviewed. Various diffusion-related effects have been observed which need to be considered in models of hydrogen diffusion. Hydrogen solubility is found to affect hydrogen incorporation and hydrogen transport.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 664: Symposium A – Amorphous and Heterogeneous Silicon-Based Films-2001 , 2001 , A13.1
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Brodsky, M.H., Cardona, M. and Cuomo, J.J., Phys. Rev B16, 3556 (1977).Google Scholar
2. Conradi, M. S. and Norberg, R.E., Phys. Rev. B24, 2285 (1981)10.1103/PhysRevB.24.2285Google Scholar
3. Löhneysen, H. v., Schink, H.J. and Cardona, W., Phys. Rev. Lett. 52, 549 (1984)10.1103/PhysRevLett.52.549Google Scholar
4. Graebner, J.E., Cardona, B., Allen, L.C., Biegelsen, D.K., and Cardona, M., Phys. Rev. Lett. 52, 553 (1984)10.1103/PhysRevLett.52.553Google Scholar
5. Graebner, J.E., Allen, L.C., and Golding, B., Phys. Rev. B31, 904 (1985)Google Scholar
6. Norberg, R.E., Fedders, P.A., and Leopold, D.J., MRS Symp.Proc. 420, 475 (1996)Google Scholar
7. Norberg, R.E., Leopold, D.J. and Fedders, P.A., J. Non-Cryst. Solids 227–230, 124 (1998)10.1016/S0022-3093(98)00267-1Google Scholar
8. Chabal, Y. J. and Patel, C. K.N., Phys. Rev. Lett. 53, 1771 (1984)Google Scholar
9. Cardona, M., Phys. Status Solidi (b) 118, 463 (1983)Google Scholar
10. Wagner, H. and Beyer, W., Solid State Commun. 48, 585 (1983)Google Scholar
11. Mahan, A.H., Raboisson, P., Williamson, D.L. and Tsu, R., Solar Cells 21, 117 (1987)Google Scholar
12. Biegelsen, D.K., Street, R.A., Tsai, C.C., and Knights, J.C., Phys. Rev. B20 (1979) 4839 Google Scholar
13. Beyer, W. and Wagner, H., J. Non-Cryst. Solids 59–60, 161 (1983)10.1016/0022-3093(83)90547-1Google Scholar
14. Beyer, W., in: Tetrahedrally-Bonded Amorphous Semiconductors, Adler, D. and Fritzsche, H., eds. (Plenum, New York, 1985) 129 Google Scholar
15. Beyer, W., Hapke, P. and Zastrow, U., MRS Symp. Proc. 467, 343 (1997)Google Scholar
16. Beyer, W., Phys. Stat. Solidi (a) 159, 53 (1997)Google Scholar
17. Beyer, W., in: Semiconductors and Semimetals Vol 61, Nickel, N.H., ed (Academic, San Diego, 1999) 165 Google Scholar
18. Street, R.A. and Tsai, C.C., Philos. Mag. B57, 663 (1988)Google Scholar
19. Beyer, W. and Wagner, H., J. Appl. Phys. 53, 8745 (1982)Google Scholar
20. Acco, S., Williamson, D.L., Stolk, P.A., Saris, F.W., Boogard, M.J. Van den, Sinke, W.C., Weg, W.F. Van der, Roords, S. and Zalm, P.C., Phys. Rev. B53, 4415 (1996)Google Scholar
21. Beyer, W. and Zastrow, U., J. Non-Cryst. Solids 266–269, 206 (2000)10.1016/S0022-3093(99)00822-4Google Scholar
22. Wieringen, A. Van and Warmoltz, N., Physica 22, 849 (1956)Google Scholar
23. Carlson, D.E. and Magee, C.W., Appl. Phys. Lett. 33, 81 (1978)Google Scholar
24. Branz, H.M., Asher, S., Nelson, B.P. and Kemp, M., J. Non-Cryst. Solids 164–166, 269 (1993)Google Scholar
25. Jackson, W.B., Tsai, C.C., Santos, P.V., J. Non-Cryst. Solids 137–138, 21 (1991)Google Scholar
26. Jackson, W.B. and Tsai, C.C., Phys. Rev. B45, 6564 (1992)Google Scholar
27. Fedders, P.A., MRS Symp. Proc. 609, A20.5.1 (2000)Google Scholar
28. Doremus, R.H., Mat. Res. Innovat. 4, 49 (2000)Google Scholar
29. Beyer, W., these ProceedingsGoogle Scholar
30. Mahan, A.H., Johnson, E.J., Crandall, R.S., and Branz, H., MRS Symp. Proc. 377, 413 (1995)10.1557/PROC-377-413Google Scholar
31. Santos, P.V. and Jackson, W.B., Phys. Rev. B46, 4595 (1992)Google Scholar
32. Shinar, J., Shinar, R., Wu, X.-L., Mitra, S. and Girvan, R.F., Phys. Rev. B43, 1631 (1991)Google Scholar
33. Santos, P.V., Johnson, N.M., and Street, R.A., Phys. Rev. Lett. 67, 2686 (1991)Google Scholar
34. Branz, H.M., Asher, S., Gleskova, H. and Wagner, S., Phys. Rev. B59, 5513 (1999)Google Scholar
35. Rath, J.K., Schropp, R.E.I. and Beyer, W., J. Non-Cryst. Solids 266–269, 190 (2000)Google Scholar
36. Beyer, W. and Zastrow, U., MRS Symp. Proc. 609, A20.4.1 (2000)Google Scholar
37. Street, R.A., Hack, M., and Jackson, R.A., Phys. Rev. B37, 4309 (1988)Google Scholar
38. Street, R.A., Tsai, C.C., Kakalios, J. and Jackson, W.B., Philos. Mag. B56, 305 (1987)Google Scholar
39. Kakalios, J., in: Hydrogen in Semiconductors, Pankove, J.I. and Johnson, N.M., eds.(Academic, San Diego, 1991) 381 Google Scholar
40. Beyer, W. and Wagner, H., MRS Symp. Proc. 336, 323 (1994)Google Scholar
41. Abeles, B., Yang, L., Leta, D.P., and Majkrzak, C., J. Non-Cryst. Solids 97–98, 353 (1987)Google Scholar
42. Beyer, W. and Zastrow, U., MRS Symp. Proc. 420, 497 (1996)10.1557/PROC-420-497Google Scholar
43. Street, R. A., Solar Cells 30, 207 (1991)Google Scholar
44.Y. Khait, L., Weil, R., Beserman, R., Beyer, W. and Wagner, H., Phys. Rev. B42, 9000 (1990)Google Scholar
45. Beyer, W. and Zastrow, U., MRS Symp. Proc. 507, 679 (1998)Google Scholar
46. Beyer, W. and Wagner, H., J. Phys. Colloq. Orsay, Fr. 42, C4–783 (1981)Google Scholar
47. Walle, C.G. Van de, Denteneer, P.J.H., Bar-Yam, Y. and Pantelides, S.T., Phys. Rev. B39, 10791 (1989)Google Scholar
48. Weil, R., Busso, A. and Beyer, W., Appl. Phys. Lett. 53, 2477 (1988)Google Scholar