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The Development of Zero-temperature-gradient Zero-bias Thermally Stimulated Current (ZTGZBTSC) Spectroscopy Technique for the Detection of Defect States in Ultra-thin High-k Dielectric Films

Published online by Cambridge University Press:  01 February 2011

Wai Shing Lau ,
Kum Fai Wong ,
Taejoon Han  and
N. P. Sandler
Wai Shing Lau
Affiliation:
ewslau@ntu.edu.sg, Nanyang Technological University, School of EEE, NTU, School of EEE, Block S2.1, Nanyang Avenue, Singapore, Singapore, 639798, Singapore, (65) 97425167, (65) 6733318
Kum Fai Wong
Affiliation:
ewslau@ntu.edu.sg, Nanyang Technological University, School of EEE, NTU, Sch ool of EEE, Block S2.1, Nanyang Avenue, Singapore, Singapore, 639798, Singapore
Taejoon Han
Affiliation:
taejoon.han@lamrc.com, Lam Research Corporation, Fremont, California, 94538, United States
N. P. Sandler
Affiliation:
taejoon.han@lamrc.com, Lam Research Corporation, Fremont, California, 94538, United States
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Abstract

Previously, we have reported our application of the zero-bias thermally stimulated current (ZBTSC) spectroscopy technique to study defect states in high-dielectric constant insulator films like tantalum oxide (Ta2O5) with much less parasitic current which can be a serious limitation for the conventional thermally stimulated current (TSC) method. However, a parasitic current can still be observed for ZBTSC because of a small parasitic temperature gradient across the sample. The thermal design of the ZBTSC system can be improved, resulting in zero-temperature-gradient ZBTSC (ZTGZBTSC) which can be used to detect deeper traps than ZBTSC.

Keywords

insulatordefectsthermally stimulated current
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 917: Symposium E – Gate Stack Scaling – Materials Selection, Role of Interfaces, and Reliability Implications , 2006 , 0917-E05-18
Copyright
Copyright © Materials Research Society 2006

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References

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