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Determination of Pore Size Distributions in Nano-Porous Thin Films from Small Angle Scattering

Published online by Cambridge University Press:  01 February 2011

Barry J. Bauer ,
Ronald C. Hedden ,
Hae-Jeong Lee ,
Christopher L. Soles  and
Da-Wei Liu
Barry J. Bauer
Affiliation:
Polymers Division, NIST 100 Bureau Dr., Mail Stop 8541 Gaithersburg, MD 20899-8541
Ronald C. Hedden
Affiliation:
Polymers Division, NIST 100 Bureau Dr., Mail Stop 8541 Gaithersburg, MD 20899-8541
Hae-Jeong Lee
Affiliation:
Polymers Division, NIST 100 Bureau Dr., Mail Stop 8541 Gaithersburg, MD 20899-8541
Christopher L. Soles
Affiliation:
Polymers Division, NIST 100 Bureau Dr., Mail Stop 8541 Gaithersburg, MD 20899-8541
Da-Wei Liu
Affiliation:
Polymers Division, NIST 100 Bureau Dr., Mail Stop 8541 Gaithersburg, MD 20899-8541
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Abstract

Small angle neutron and x-ray scattering (SANS, SAXS) are powerful tools in determination of the pore size and content of nano-porous materials with low dielectric constants (low-k) that are being developed as interlevel dielectrics. Several models have been previously applied to fit the scattering data in order to extract information on the average pore and/or matrix size. A new method has been developed to provide information on the size distributions of the pore and matrix phases based on the “chord length distribution” introduced by Tchoubar and Mering. Examples are given of scattering from samples that have size distributions that are narrower and broader than the random distribution typical of scattering described by Debye, Anderson, and Brumberger. An example of fitting SANS data to a phase size distribution is given.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 766: Symposium E – Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics - 2003 , 2003 , E8.9
Copyright
Copyright © Materials Research Society 2003

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