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Deposition of Flame Grown Diamond Films in a Controlled Atmosphere

Published online by Cambridge University Press:  25 February 2011

Kathleen Doverspike ,
James E. Butler  and
Jaime A. Freitas Jr
Kathleen Doverspike
Affiliation:
Naval Research Laboratory, Code 6861, Washington, D. C. 20375–5000
James E. Butler
Affiliation:
Naval Research Laboratory, Code6174, Washington, D. C. 20375–5000
Jaime A. Freitas Jr
Affiliation:
Sachs/Freeman Assoc. Inc. Landover. MD 20785–5396
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Abstract

Polycrystalline diamond films were synthesized both by using an open atmosphere combustion flame, and also using a combustion flame in an enclosed chamber. By operating the pre-mixed oxy-acetylene torch in a chamber, we were able to vary the atmosphere around the flame in a controlled manner and study the effects on the diamond films. Varying the atmosphere around the flame is of interest to control the incorporation of unwanted gases, such as room air, and to obtain finer control over the flame properties. We report on the properties of films grown in the open atmosphere and in the chamber with oxygen and argon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 242: Symposium G – Wide Band-Gap Semiconductors , 1992 , 37
Copyright
Copyright © Materials Research Society 1992

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References

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