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Deposition of Diamond-Like Carbon (DLC) With Picosecond Laser Pulses

Published online by Cambridge University Press:  21 February 2011

F. Qian ,
R.K. Singh ,
S.K. Dutta  and
P.P. Pronko
F. Qian
Affiliation:
Univ. of Florida, Department of Materials Science and Engineering, Gainesville, FL
R.K. Singh
Affiliation:
Univ. of Florida, Department of Materials Science and Engineering, Gainesville, FL
S.K. Dutta
Affiliation:
Univ. of Florida, Department of Materials Science and Engineering, Gainesville, FL
P.P. Pronko
Affiliation:
Center for Ultrafast Optical Science, Univ. of Michigan, Ann Arbor, Ml.
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Abstract

We have deposited unhydrogenated diamond-like carbon (DLC) thin films by laser ablation of graphite, using a high power Ti: Sapphire solid state laser system. DLC films were deposited onto single crystal silicon substrates at room temperature with picosecond laser pulses, at peak power densities in the 5x1011 - 8x1012 W/cm2 range. A variety of techniques, including scanning and transmission electron microscopy (SEM and TEM), Raman spectroscopy, spectroscopic ellipsometry (SE), and electron energy loss spectroscopy (EELS) have been used to analyze the film quality. Smooth, partially transparent films were produced, distinct from the graphite target. Sp3 volume fractions were found to be in the 50 - 60% range, with optical bandgaps ranging from 0. 6 to1. 2 eV, depending on the laser power density.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 354: Symposium A – Beam Solid Interactions for Materials Synthesis and Characterization , 1994 , 615
Copyright
Copyright © Materials Research Society 1995

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