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Dependence of Field-Effect Mobility on Deposition Conditions in a-Si:H TFT
Published online by Cambridge University Press: 16 February 2011
Abstract
High electron Mobility (over 3 cm2/Vs) thin film transistors (TFTs) have been fabricated using a-Si:H on thermally oxidized crystalline Si substrate. The procedures for fabricating the high performance TFTs are presented and the possible reasons for the high mobility are discussed.
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- Copyright © Materials Research Society 1994