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Decomposition Mechanisms of Antimony Source Compounds for Organometallic Vapor-Phase Epitaxy

Published online by Cambridge University Press:  25 February 2011

Cory A. Larsen ,
Robert W. Gedridge Jr. ,
Shin Hwa Li  and
Gerald B. Stringfellow
Cory A. Larsen
Affiliation:
Dept. of Material Science and Engineering, University of Utah, Salt Lake City, UT 84112
Robert W. Gedridge Jr.
Affiliation:
Chemistry Division, Research Dept., Naval Weapons Center, China Lake, CA 93555
Shin Hwa Li
Affiliation:
Dept. of Material Science and Engineering, University of Utah, Salt Lake City, UT 84112
Gerald B. Stringfellow
Affiliation:
Dept. of Material Science and Engineering, University of Utah, Salt Lake City, UT 84112
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Abstract

The decompositions of tertiary stibines (R3Sb, R = methyl, vinyl, isopropyl) were studied in an atmospheric pressure flow tube reactor, using D2 and He as carrier gases. D2 was used to isotopically label the byproducts in order to elucidate the pyrolysis mechanism. The exhaust products were analyzed by a time-of-flight mass spectrometer. The decomposition of these tertiary stibines in the presence of group Ill precursors was studied in order to simulate the conditions of organometallic vapor phase epitaxial growth. A comparison between the pyrolysis temperatures, decomposition mechanisms, and surface area effects of these Sb source compounds is presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 204: Symposium E – Chemical Perspectives of Microelectronic Materials II , 1990 , 129
Copyright
Copyright © Materials Research Society 1991

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References

REFERENCES

1. Cherng, M.J., Jen, H.R., Larsen, C.A., Stringfellow, G.B., Lundt, H., Taylor, P.C., J. Cryst. Growth 22, 408 (1986).Google Scholar
2. Jou, M.J., Cherng, Y.T., Jen, H.R., Stringfellow, G.B., Appl. Phys. Lett. 52, 549 (1988).Google Scholar
3. Jou, M.J., Cherng, Y.T., Stringfellow, G.B., J. Appl. Phys. 64, 1472 (1988).Google Scholar
4. Cherng, M.J., Cherng, Y.T., Jen, H.R., Harper, P., Cohen, R.M., Stringfellow, G.B., J. Electron. Mater. 15, 79 (1986).Google Scholar
5. (a) Nataf, G., Verie, C., J. Cryst. Growth 5 87 (1981). (b) P.K. Chiang, S.M. Bediar, Appl. Phys. Lett. 46. 383 (1985). (c) R.M. Biefeld, J. Cryst. Growth 7., 255 (1986).Google Scholar
6. Humphreys, T.P., Chiang, P.K., Bediar, S.M., Parikh, N.R., Appl. Phys. Lett. 52, 142 (1988).Google Scholar
7. Ma, K.Y, Fang, D.H., Jaw, R.M., Cohen, R.M., Stringfellow, G.B., Kosar, W.P., Brown, D.W., Appl. Phys. Lett. 55, 2420 (1989).Google Scholar
8. Sugiura, O., Kameda, H., Shiina, K., Matsumura, M., J. Electron. Mater. 12, 11 (1988).Google Scholar
9. (a) Devyatykh, G.G., Kedyarkin, V.M., Zorin, A.D., Russ. J. Inorg. Chem. 14,1055 (1969). (b) A.B. Burg, L.R. Grant, J. Am. Chem. Soc. 81, 1 (1959).Google Scholar
10. Maier, L., Seyferth, D., Stone, F.G.A., Rochowj, E.G.. Am. Chem. Soc. 79, 5884 (1957).Google Scholar
11. Gedridge, R.W. Jr., Harris, D.C., Higa, K.T., Nissan, R.A., Organometallics 8, 2817 (1989).Google Scholar
12. Handbook of Chemistry and Physics, ed. Weast, R.C. (CRC, Boca Raton, FL, 1988), 70th ed., pp F206–207.Google Scholar
13. Gedridge, R.W. Jr., Higa, K.T., Nissan, R.A., Organometallics (in press).Google Scholar
14. Breunig, H.J., Kanig, W., J. Organomet. Chem. 186, C5 (1980).Google Scholar
15. Buchan, N.I., Larsen, C.A., Stringfellow, G.B., Appl. Phys. Lett. 51, 1024 (1987).Google Scholar
16. Larsen, C.A., Li, S.H., Stringfellow, G.B., Chem. Mater. (in press).Google Scholar
17. Larsen, C.A., Gedridge, R.W. Jr., Stringfellow, G.B., Chem. Mater. (in press).Google Scholar
18. Price, S.J.C., Richard, J.P., Can. J. Chem. 50, 966 (1972).Google Scholar
19. Jacko, M.G., Price, S.J., Can. J. Chem. 42, 1198 (1964).Google Scholar
20. Buchan, N.I., Larsen, C.A., Stringfellow, G.B., J. Cryst. Growth 22, 591 (1988).Google Scholar
21. Larsen, C.A., Buchan, N.I., Li, S.H., Stringfellow, G.B., J. Cryst. Growth 102, 103 (1990).Google Scholar