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Copper Oxide Edge-Termination for GaN Schottky Barrier Diodes with Low Turn-on Voltage
Published online by Cambridge University Press: 16 January 2012
Abstract
In this study, we propose copper oxide (CuOx) edge-termination for GaN-based Schottky barrier diodes (SBDs) with low turn-on voltage. CuOx fabricated by thermal oxidization of sputtered Cu film at 275°C consisted mainly of Cu2O which is known as a p-type semiconductor. We applied CuOx edge-termination to GaN SBDs with tantalum (Ta) Schottky electrode which has low work function of 4.25 eV. The experimental results of current-voltage characteristics insisted that CuOx edge-termination structure was effective to increase breakdown voltage of GaN SBDs with keeping low turn-on voltage of 0.29 V at 10 A/cm2.
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- Copyright © Materials Research Society 2012