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Comprehensive Mechanical and Tribological Characterization of Ultra-Thin-Films

Published online by Cambridge University Press:  01 February 2011

Norm Gitis ,
Michael Vinogradov ,
Ilja Hermann  and
Suresh Kuiry
Norm Gitis
Affiliation:
ngitis@cetr.com, Center for Tribology, Inc., none, 1715 Dell Ave, Campbell, CA, 95008, United States
Michael Vinogradov
Affiliation:
mvinogradov@cetr.com, Center for Tribology, Inc., 1715 Dell Ave, Campbell, CA, 95008, United States
Ilja Hermann
Affiliation:
ihermann@cetr.com, Center for Tribology, Inc., 1715 Dell Ave, Campbell, CA, 95008, United States
Suresh Kuiry
Affiliation:
SKuiry @cetr.com, Center for Tribology, Inc., 1715 Dell Ave, Campbell, CA, 95008, United States
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Abstract

Based on recent studies, mechanical and tribological properties such as hardness, Young's modulus, friction, and scratch adhesion strength on various coatings and ultra-thin films are reported. These results were obtained using a Universal Nano+Micro Tester UNMT-1, suitably designed for comprehensive evaluation of mechanical and tribological properties of bulk materials, coatings and thin films. Results indicate that a substrate effect for ultra-thin films is substantial when using conventional static nanoindentation technique, while negligible with an advanced dynamic nano-indentation. Comparative results of hardness and Young's modulus obtained from various techniques are presented. Also, a means to evaluate friction and adhesion strength of thin films is highlighted, using DLC specimens as an example.

Keywords

thin filmhardnessstress/strain relationship
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1049: Symposium AA – Fundamentals of Nanoindentation and Nanotribology IV , 2007 , 1049-AA02-04
Copyright
Copyright © Materials Research Society 2008

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References

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