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Composition Phdfiies in AlGaAs/GaAs and InGaAs/InP Strutures Examined by Convergent Beam Electron Diffraction

Published online by Cambridge University Press:  28 February 2011

D. Cherns ,
I.K. Jordan  and
R. Vincent
D. Cherns
Affiliation:
H. H. Wills Physics Laboratory, University of Bristol, Tyndall Avenue, Bristol BS8 ITL, UK
I.K. Jordan
Affiliation:
H. H. Wills Physics Laboratory, University of Bristol, Tyndall Avenue, Bristol BS8 ITL, UK
R. Vincent
Affiliation:
H. H. Wills Physics Laboratory, University of Bristol, Tyndall Avenue, Bristol BS8 ITL, UK
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Abstract

The large angle method of convergent beam electron diffraction (LAMED) has been used to examine multi-quantum well (M1W) and single quantum well (SQW) samples of AlGaAs/GaAs and InP/InGaAs viewed approximately along the growth direction. The method combines an image of the specimen with the rocking curve, typically over about 6° for a selected reflection. LACBED patterns fran MQW samples show many orders of superlattice satellite reflections and can be used to profile compositions in both periodic and less regular structures. For SQW samples, we can measure the local quantum well thickness to near-monolayer precision.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 138: Symposium Q – Characterization of the Structure and Chemistry of Defects in Materials , 1988 , 431
Copyright
Copyright © Materials Research Society 1989

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References

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