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Composition Control during Growth of AlGaN Cladding Layers for InGaN-MQW Lasers with Ridge Formed by Selective Re-growth (RiS-type Lasers)
Published online by Cambridge University Press: 21 March 2011
Abstract
We investigated the mask-pattern and trimethylalminium (TMAl)-flow-rate dependence of the Al composition in AlGaN selective growth for novel InGaN multiple quantum well lasers having selectively grown ridge structures (RiS-type lasers). The Al composition decreased with increases of the local coverage ratio. This result was explained quantitatively by a simple model in which the Al is deposited as polycrystals on the mask without migration occurring and the Ga is concentrated into the window. Under a high TMAl flow-rate condition, this effect of lowering the Al composition was weakened by the high Ga consumption on the mask, and an desirable Al composition for GaN-based lasers was realized. The model can be used to control the composition of p-AlGaN layers for RiS-type lasers.
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- Copyright © Materials Research Society 2002