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Comparative Study of Structural Properties and Photoluminescence in InGaN Layers with a High in Content

Published online by Cambridge University Press:  03 September 2012

A. Vantomme ,
M.F. Wu ,
S. Hogg ,
G. Langouche ,
K. Jacobs ,
I. Moerman ,
M.E. White ,
K.P. O'Donnell ,
L. Nistor  and
J. Van Landuyt
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A. Vantomme
Affiliation:
Inst. Kern- en Stralingsfysica, Univ. of Leuven, B-3001 Leuven, Belgiumy
M.F. Wu
Affiliation:
Inst. Kern- en Stralingsfysica, Univ. of Leuven, B-3001 Leuven, Belgiumy
S. Hogg
Affiliation:
Inst. Kern- en Stralingsfysica, Univ. of Leuven, B-3001 Leuven, Belgiumy
G. Langouche
Affiliation:
Inst. Kern- en Stralingsfysica, Univ. of Leuven, B-3001 Leuven, Belgiumy
K. Jacobs
Affiliation:
Dept. of Information Technology, Univ. of Gent-IMEC, B-9000 Gent, Belgium
I. Moerman
Affiliation:
Dept. of Information Technology, Univ. of Gent-IMEC, B-9000 Gent, Belgium
M.E. White
Affiliation:
Dept. of Physics and Applied Physics, Univ. of Strathclyde, Glasgow, U.K
K.P. O'Donnell
Affiliation:
Dept. of Physics and Applied Physics, Univ. of Strathclyde, Glasgow, U.K
L. Nistor
Affiliation:
Institute of Atomic Physics, Bucharest, Romania EMAT, Univ. of Antwerp (RUCA), B-2020 Antwerp, Belgium IMEC, B-3001 Leuven, Belgium
J. Van Landuyt
Affiliation:
EMAT, Univ. of Antwerp (RUCA), B-2020 Antwerp, Belgium
H. Bender
Affiliation:
IMEC, B-3001 Leuven, Belgium
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Abstract

Rutherford backscattering and channeling spectrometry (RBS), photoluminescence (PL) spectroscopy and transmission electron microscopy (TEM) have been used to investigate macroscopic and microscopic segregation in MOCVD grown InGaN layers. The PL peak energy and In content (measured by RBS) were mapped at a large numberof distinct points on the samples. An indium concentration of 40%, the highest measured in this work, corresponds to a PL peak of 710 nm, strongly suggesting that the lightemitting regions of the sample are very indium-rich compared to the average measured by RBS. Cross-sectional TEM observations show distinctive layering of the InGaN films. The TEM study further reveals that these layers consist of amorphous pyramidal contrast features with sizes of order 10 nm. The composition of these specific contrast features is shown to be In-rich compared to the nitride matrix.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 595: Symposium W – GaN and Related Alloys - 1999 , 1999 , F99W11.38
Copyright
Copyright © Materials Research Society 1999

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