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Circuit-Level and Layout-Specific Interconnect Reliability Assessments

Published online by Cambridge University Press:  17 March 2011

S.P. Hau-Riege ,
C.V. Thompson ,
C.S. Hau-Riege ,
V.K. Andleigh ,
Y. Chery  and
D. Troxel
S.P. Hau-Riege
Affiliation:
Department of Materials Science and Engineering, M.I.T., Cambridge, MA
C.V. Thompson
Affiliation:
Department of Materials Science and Engineering, M.I.T., Cambridge, MA
C.S. Hau-Riege
Affiliation:
Department of Materials Science and Engineering, M.I.T., Cambridge, MA
V.K. Andleigh
Affiliation:
Department of Materials Science and Engineering, M.I.T., Cambridge, MA
Y. Chery
Affiliation:
Department of Electrical Engineering and Computer Science, M.I.T., Cambridge, MA
D. Troxel
Affiliation:
Department of Electrical Engineering and Computer Science, M.I.T., Cambridge, MA
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Abstract

We have developed a methodology and a prototype tool for making computationally efficient circuit-level assessments of interconnect reliability. A key component of this process has been the development of simple analytic models that relate the reliability of the complex structures in layouts to the simpler straight, junction-free lines of uniform width that are typically used in lifetime tests. We have considered interconnect trees as the fundamental reliability units, where trees can have multiple junctions and limbs, and can also have width variations. We have developed analytic methods for identifying trees which are immune to failure, and have demonstrated that computationally simple techniques lead to the identification of a large fraction of the trees in a circuit as immune to failure (i.e., that they are ‘immortal’). These trees therefore need not be considered in further analyses. Using simulations and analytic treatments we have also developed default models which allow estimation of the reliability of the remaining trees. These models have been tested and validated them through experiments on simple tree structures with junctions and line-width transitions. Our prototype circuit-level reliability analysis tool projects the reliability of circuits based on specific layouts, and provides a rank listing of the reliability of mortal trees. This allows the user to accept the assessment as is, to carry out more accurate but computationally-intensive analyses of the least reliable trees, or to modify the layout or process to address reliability concerns and reanalyze the reliability.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 612: Symposium D – Materials, Technology & Reliability for Advanced Interconnects.. , 2000 , D2.2.1
Copyright
Copyright © Materials Research Society 2000

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