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Change From Polycrystalline to Amorphous Growth in Sputtered CoZr/Cu Multilayers

Published online by Cambridge University Press:  10 February 2011

J. Langer ,
R. Mattheis ,
S. Schmidt ,
St. Senz ,
D. Hesse ,
Th. Schuhrke ,
R. Fischer  and
J. Zweck
J. Langer
Affiliation:
IPHT Jena e.V., Postfach 100 239, D-07702 Jena, GERMANY
R. Mattheis
Affiliation:
IPHT Jena e.V., Postfach 100 239, D-07702 Jena, GERMANY
S. Schmidt
Affiliation:
IPHT Jena e.V., Postfach 100 239, D-07702 Jena, GERMANY
St. Senz
Affiliation:
Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, D-06120 Halle/Saale, GERMANY
D. Hesse
Affiliation:
Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, D-06120 Halle/Saale, GERMANY
Th. Schuhrke
Affiliation:
Institut für Experimentelle und Angewandte Physik, Universität Regensburg, D-93040 Regensburg, GERMANY
R. Fischer
Affiliation:
Institut für Experimentelle und Angewandte Physik, Universität Regensburg, D-93040 Regensburg, GERMANY
J. Zweck
Affiliation:
Institut für Experimentelle und Angewandte Physik, Universität Regensburg, D-93040 Regensburg, GERMANY
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Abstract

We present an investigation of structural changes occurring in bilayer stacks with crystalline columnar growth when one of the layers is substituted by layers known to grow amorphous. In Co/Cu multilayers the Co layers were substituted by CoZr layers of varying Zr content and layer thickness. Structural characterisation was performed by transmission electron microscopy (TEM). We show that the amorphisation of the CoZr layers leading to a destruction of the columnar growth depends both on the Zr content and on the thickness of the CoZr layers. Additionally a change to textured growth with a <111> normal to the substrate occurs with increasing Zr content. We explain our observations by a simple picture based on the hard sphere model.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 472: Symposium I – Polycrystalline Thin Films - Structure, Texture, Properties..III , 1997 , 215
Copyright
Copyright © Materials Research Society 1997

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References

REFERENCES

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