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Challenges in DMD™ Assembly and Test

Published online by Cambridge University Press:  17 March 2011

S. Joshua Jacobs ,
Joshua J. Malone ,
Seth A. Miller ,
Armando Gonzalez ,
Roger Robbins  and
Vincent C. Lopes
S. Joshua Jacobs
Affiliation:
Dennis Doane Digital Imaging Texas Instruments 13536 N. Central Expressway MS 914 Dallas, TX 75243
Joshua J. Malone
Affiliation:
Dennis Doane Digital Imaging Texas Instruments 13536 N. Central Expressway MS 914 Dallas, TX 75243
Seth A. Miller
Affiliation:
Dennis Doane Digital Imaging Texas Instruments 13536 N. Central Expressway MS 914 Dallas, TX 75243
Armando Gonzalez
Affiliation:
Dennis Doane Digital Imaging Texas Instruments 13536 N. Central Expressway MS 914 Dallas, TX 75243
Roger Robbins
Affiliation:
Dennis Doane Digital Imaging Texas Instruments 13536 N. Central Expressway MS 914 Dallas, TX 75243
Vincent C. Lopes
Affiliation:
Dennis Doane Digital Imaging Texas Instruments 13536 N. Central Expressway MS 914 Dallas, TX 75243
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Abstract

The Digital Micromirror Device™ (DMD™) developed at Texas Instruments is a spatial light modulator composed of 500,000 to 1.3 million movable micromachined aluminum mirrors. The DMD™ serves as the engine for the current generation of computer-driven slide and video projectors, and for next generation devices in digital television and movie projectors. The unique architecture and applications of the device present several packaging and test challenges. This paper provides a description of package humidity modeling and verification testing, as well as an overview of the automated optical testing and test equipment that have been developed to support manufacturing of the DMD™.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 657: Symposia EE – Materials Science of Microelectromechanical Systems (MEMS) Devices III , 2000 , EE6.1
Copyright
Copyright © Materials Research Society 2001

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References

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