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Cathodoluminescence Microanalysis of Electron Irradiation Damage in Wide Band Gap Materials

Published online by Cambridge University Press:  15 February 2011

M.A. stevens Kalceff ,
M.R. Phillips ,
M. Toth ,
A.R. Moon ,
D.N. Jamieson ,
J.O. Orwa  and
S. Prawer
M.A. stevens Kalceff
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO 123, Broadway NSW 2007, AUSTRALIA, marion@phys.uts.edu.au
M.R. Phillips
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO 123, Broadway NSW 2007, AUSTRALIA
M. Toth
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO 123, Broadway NSW 2007, AUSTRALIA
A.R. Moon
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO 123, Broadway NSW 2007, AUSTRALIA
D.N. Jamieson
Affiliation:
School of Physics, University of Melbourne, Microanalytical Research Centre, Parkville, Vic. 3052, AUSTRALIA
J.O. Orwa
Affiliation:
School of Physics, University of Melbourne, Microanalytical Research Centre, Parkville, Vic. 3052, AUSTRALIA
S. Prawer
Affiliation:
School of Physics, University of Melbourne, Microanalytical Research Centre, Parkville, Vic. 3052, AUSTRALIA
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Abstract

Cathodoluminescence (CL) microanalysis (spectroscopy and microscopy) in an electron microscope enables both pre-existing and irradiation induced local variations in the bulk and surface defect structure of wide band gap materials to be characterized with high spatial (lateral and depth) resolution and sensitivity. CL microanalytical techniques allow the in situ monitoring of electron irradiation induced damage, the post irradiation assessment of damage induced by other energetic radiation, and the investigation of irradiation induced electromigration of mobile charged defect species. Electron irradiated silicon dioxide polymorphs and MeV H+ ion implanted Type Ila diamond have been investigated using CL microanalytical techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 540: Symposium N / Microstructural Processes in Irradiated Materials , 1998 , 43
Copyright
Copyright © Materials Research Society 1999

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