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Carbon Networks Synthesized using Microwave Plasma Enhanced Chemical Vapor Deposition

Published online by Cambridge University Press:  15 March 2011

D. J. Yang ,
Qing Zhang ,
S.F. Yoon ,
J. Ahn ,
S.G. Wang  and
Q. Wang
D. J. Yang
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798
Qing Zhang
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798
S.F. Yoon
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798
J. Ahn
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798
S.G. Wang
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798
Q. Wang
Affiliation:
Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798
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Abstract

A new carbon network is prepared using microwave plasma enhanced chemical vapor deposition(MPCVD) under the plasma of a mixture of methane, hydrogen and nitrogen at 720 °C. The Field Emission Scanning Electronic Microscopy(FESEM) images show that the carbon nanotubes are self-organized into carbon networks, which is different from the previously reported carbon nanotube ropes or nanofibers. The carbon networks are about 1 micron in diameter, more than 10 microns in length and composed of hundreds of carbon nanotubes with the diameter from 20 to 100 nm. Energy Dispersive X-Ray(EDX) results confirm that the network is carbon in nature, with a small amount of Ni which was used as catalyst.

Type
Article
Information
MRS Online Proceedings Library (OPL) , Volume 706: Symposium Z – Making Functional Materials with Nanotubes , 2001 , Z3.14.1
Copyright
Copyright © Materials Research Society 2002

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