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Applications of Polysilicon Films in Microsensors and Microactuators

Published online by Cambridge University Press:  22 February 2011

Roger T. Howe
Roger T. Howe*
Affiliation:
Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences and the Electronics Research Laboratory, University of California, Berkeley, California 94720
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Abstract

This paper reviews the applications of polysilicon in microsensor technology and in the emerging field of microfabricated actuators. Polysilicon is an attractive material for thin-film strain gauges, and is also used to fabricate micromechanical structures. The need for better understanding of the non-electrical properties of polysilicon, such as Young's modulus, residual strain, ultimate strength, friction, and wear, is emphasized.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 106: Symposium G – Polysilicon Films and Interfaces , 1987 , 213
Copyright
Copyright © Materials Research Society 1988

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