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Application of Spectroscopic Ellipsometry and Infrared Spectroscopy for the Real-Time Control and Characterization of a-Si:H Growth in a-Si:H/c-Si Heterojunction Solar Cells

Published online by Cambridge University Press:  01 February 2011

Hiroyuki Fujiwara  and
Michio Kondo
Hiroyuki Fujiwara
Affiliation:
Research Center for Photovoltaics, National Institute of Advanced Industrial Science and Technology, Umezono 1-1-1, Tsukuba, Ibaraki 305-8568, Japan
Michio Kondo
Affiliation:
Research Center for Photovoltaics, National Institute of Advanced Industrial Science and Technology, Umezono 1-1-1, Tsukuba, Ibaraki 305-8568, Japan
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Abstract

We have demonstrated real-time process control of a-Si:H growth in an a-Si:H/c-Si heterojunction solar cell by spectroscopic ellipsometry (SE). Accurate thickness control of a-Si:H p-i layers with a precision better than ± Å has been realized by this technique. From real-time attenuated total reflection spectroscopy (ATR), we find the formation of a porous interface layer with a maximum SiH2-hydrogen content of 27 at.% at the a-Si:H/c-Si interface, although a rather high conversion efficiency of 14.6 % has been obtained in the solar cell. We found that an optimum i-layer thickness for the a-Si:H/c-Si solar cells is consistent with the thickness at which the a-Si:H i-layer growth reaches a steady state after the H-rich interface-layer formation. We have applied SE further to determine the dielectric functions of In2O3:Sn and ZnO:Ga with different carrier concentrations. From the dielectric function analysis, the effective mass m is extracted. We find linear increases in m as the carrier concentration of In2O3:Sn and ZnO:Ga increases. The validity of our analyses has been confirmed from excellent agreement between carrier concentrations determined by SE and Hall measurements. The construction of the optical database further enabled us to calculate a reflectance spectrum of the a-Si:H/c-Si solar cell accurately.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 862: Symposium A – Amorphous and Nanocrystalline Silicon Science and Technology–2005 , 2005 , A14.1
Copyright
Copyright © Materials Research Society 2005

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