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Application of Energy-Filtering Transmission Electron Microscopy on Advanced IC Device Processing

Published online by Cambridge University Press:  10 February 2011

K. M. Yin ,
L. Chang ,
F. R. Chen ,
J. J. Kai  and
H. L. Chang
K. M. Yin
Affiliation:
Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan
L. Chang
Affiliation:
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, Taiwan
F. R. Chen
Affiliation:
Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan
J. J. Kai
Affiliation:
Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan
H. L. Chang
Affiliation:
Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan
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Abstract

Energy-filtering TEM is applied to characterize the microstructures in ULSI devices. Three cases are shown for EFTEM applications: interfacial reactions in Al metallization, phase identification after arcing in Al metallization, and ONO structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 523: Symposium U – Electron Microscopy of Semiconducting Materials & ULSI Devices , 1998 , 127
Copyright
Copyright © Materials Research Society 1998

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References

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