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Published online by Cambridge University Press: 26 February 2011
EXAFS studies using glancing angle fluorescence on the interface of the Cu-Al thin film system show that the sputtering process generates a different interface structure than for an evaporated one. To obtain quantitative information, the anomalous dispersion effects have to be considered. Simple model calculations are presented for the correction factor which yield good results for Au thin film data. Extension of this model to bilayer systems is discussed.