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Waveguides Fabricated in LiNbO3 by Proton Implantation

Published online by Cambridge University Press:  15 February 2011

P. Moretti
Affiliation:
Département de Physique des Matériaux, Université Claude Bernard Lyon I, F - 69622 Villeurbanne, France
P. Thevenard
Affiliation:
Département de Physique des Matériaux, Université Claude Bernard Lyon I, F - 69622 Villeurbanne, France
K. Wirl
Affiliation:
Fachbereich Physik, Universität Osnabrück, D - 4500 Osnabrück, Germany
P. Hertel
Affiliation:
Fachbereich Physik, Universität Osnabrück, D - 4500 Osnabrück, Germany
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Abstract

Optical planar waveguides, with a controllable thickness in a very wide range, typically from 3 to 20 μm, can be fabricated by thermally controlled proton implantation in LiNbO3. In the nuclear stopping region at the end of the ion's tracks a sufficient decrease in refractive index is obtained, thus forming an adequate optical barrier. The mode confinement was investigated by dark line mode spectroscopy, and the refractive index profiles were reconstructed. The effects of different ion fluences and ion energies in the Mev range on the refractive index profile at 300 K have been investigated.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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References

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Waveguides Fabricated in LiNbO3 by Proton Implantation
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