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Transmission Characterization of Drilled Alternating-Layer Three-Dimensional Photonic Crystals

Published online by Cambridge University Press:  17 March 2011

Eiichi Kuramochi
Affiliation:
NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, 243-0198, Japan
Masaya Notomi
Affiliation:
NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, 243-0198, Japan
Itaru Yokohama
Affiliation:
NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, 243-0198, Japan
Jun-ichi Takahashi
Affiliation:
NTT Telecommunications Energy Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, 243-0198, Japan
Chiharu Takahashi
Affiliation:
NTT Telecommunications Energy Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, 243-0198, Japan NTT Advanced Technology Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, 243-0198, Japan
Takayuki Kawashima
Affiliation:
NICHe, Tohoku University, Aramaki Aza Aoba 04, Aoba-ku, Sendai, 980-8579, Japan
Shojiro Kawakami
Affiliation:
NICHe, Tohoku University, Aramaki Aza Aoba 04, Aoba-ku, Sendai, 980-8579, Japan
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Abstract

We propose a new three-dimensional photonic crystal structure or drilled alternating-layer photonic crystal (DALPC), which can be fabricated by a combination of the deposition of alternating layers of dielectric films and one-time dry etching. Our band calculation predicts that the DALPC has a photonic band gap (PBG) in all directions. We fabricated a Si/SiO2 DALPC by electron beam lithography, bias sputtering, and fluoride-gas electron cyclotron resonance etching. We measured the light transmission of the DALPC sample in both the in-plane and vertical directions. We observed a transmission minimum around the 1.4-µm-wavelength for all measured directions and TE/TM polarizations, which demonstrated a potential of the DALPC as a three-dimensional PBG material.

Type
Research Article
Copyright
Copyright © Materials Research Society 2002

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References

1. Joannopoulos, J. D., Meade, R. D., and Winn, J. N., Photonic Crystals (Princeton University Press, New Jersey, 1996).Google Scholar
2. Blanco, A., Chomski, E., Grabtchak, S., Iblsate, M., John, S., Leonard, S. W., Lopez, C., Meseguer, F., Mlguez, H., Mondla, J. P., Ozin, G. A., Toader, O., and Driel, H. M. van, Nature 405, 437 (2000)Google Scholar
3. Vlasov, Y. A., Bo, X-Z., Strum, J. C., and Norris, D. J., Nature 414, 289 (2001)Google Scholar
4. Ho, K. M., Chan, C. T., Soukoulis, C. M., Biswas, R., and Sigalas, M., Solid State Commun. 89, 413 (1994).Google Scholar
5. Sozuer, H. S. and Dowling, J. P., J. Mod. Opt. 41, 231 (1994).Google Scholar
6. Lin, S. Y., Fleming, J. G., Hetherington, D. L., Smith, B. K., Biswas, R., Ho, K. M., Sigalas, M. M, Zubrzycki, W., Kurtz, S. R., and Bur, J., Nature 394, 251 (1998)Google Scholar
7. Noda, S., Tomoda, K., Yamamoto, N. and Chutinan, A.. Science 289, 604606, 2000.Google Scholar
8. Notomi, M., Tamamura, T., Kawashima, T., and Kawakami, S., Appl. Phys. Lett. 77, 4256 (2000).Google Scholar
9. Kuramochi, E., Notomi, M., Tamamura, T., Kawashima, T., Kawakami, S., Takahashi, J., and Takahashi, C., J. Vac. Sci. Technol. B18, 3510 (2000).Google Scholar
10. Kawakami, S., Electron. Lett. 33, 1260 (1997).Google Scholar
11. Kawakami, S., Kawashima, T. and Sato, T.. Appl. Phys. Lett. 74, 463465, 1999.Google Scholar
12. Takahashi, C., Jin, Y., Nishimura, K., and Matsuo, S., Jpn. J. Appl. Phys. 39,36723676, 2000.Google Scholar