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Surface Morphologies and Optical Properties of Homoepitaxial ZnO Grown by Close-Spaced Chemical Vapor Transport

Published online by Cambridge University Press:  01 February 2011

Koji Abe
Affiliation:
abe@nitech.ac.jp, Nagoya Institute of Technology, Department of Electrical and Electronic Engineering, Gokiso Showa, Nagoya, 466-8555, Japan
Tetsuya Tokuda
Affiliation:
tokuda@laserion-lab.nitech.ac.jp, Nagoya Institute of Technology, Department of Electrical and Electronic Engineering, Gokiso, Showa, Nagoya, 466-8555, Japan
Yuta Banno
Affiliation:
banno@laserion-lab.nitech.ac.jp, Nagoya Institute of Technology, Department of Electrical and Electronic Engineering, Gokiso, Showa,, Nagoya, 466-8555, Japan
Osamu Eryu
Affiliation:
eryu@nitech.ac.jp, Nagoya Institute of Technology, Department of Electrical and Electronic Engineering, Gokiso, Showa, Nagoya, 466-8555, Japan
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Abstract

Chemical vapor transport (CVT) using carbon as a transporting agent is studied for homoepitaxial growth on O-polar ZnO substrates. To increase growth rate at high temperatures, we keep a substrate close to ZnO source powder. Surface smoothness and crystal quality of epilayers are remarkably improved by increasing a substrate temperature. Smooth surfaces are observed on the epilayer grown at substrate temperatures above 920°C.

Type
Research Article
Copyright
Copyright © Materials Research Society 2007

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References

1. Makino, T., Chia, C. H., Tuan, N. T., Segawa, Y., Kawasaki, M., Ohtomo, A., Tamura, K., and Koinuma, H., Appl. Phys. Lett. 76, 3549 (2000).CrossRefGoogle Scholar
2. Matsui, H., Saeki, H., Kawai, T., Sasaki, A., Yoshimoto, M., Tsubaki, M., and Tabata, H., J. Vac. Sci. Technol. B 22, 2454 (2004).CrossRefGoogle Scholar
3. Abe, T., Kashiwaba, Y., Onodera, S., Masuoka, F., Nakagawa, A., Endo, H., Niikura, I., and Kashiwaba, Y., J. Cryst. Growth 298, 457 (2007).CrossRefGoogle Scholar
4. Matsumoto, K. and Noda, K., J. Cryst. Growth 102, 137 (1990).CrossRefGoogle Scholar
5. Ntep, J.-M., Hassani, S. Said, Lusson, A., Tromson-Carli, A., Ballutaud, D., Didier, G., and Triboulet, R., J. Cryst. Growth 207, 30 (1999).CrossRefGoogle Scholar
6. Teke, A., Özgür, Ü., Dogan, S., Gu, X., and Morkoç, H., Nemeth, B. and Nause, J., Everitt, H. O., Phys. Rev. B 70, 195207 (2004).CrossRefGoogle Scholar

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