Skip to main content Accessibility help
×
Home
Hostname: page-component-6f6fcd54b-95llv Total loading time: 0.47 Render date: 2021-05-11T11:45:52.759Z Has data issue: true Feature Flags: {}

Submicron Ferroelectric Elements Fabricated by Direct Electron Beam Lithography

Published online by Cambridge University Press:  11 February 2011

Dong-Joo Kim
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL
Jin Seo Im
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL Chemistry Division, Argonne National Laboratory, Argonne, IL
Carol Thompson
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL Dept. of Physics, Northern Illinois University, DeKalb, IL
S. K. Streiffer
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL
G. Wiederrecht
Affiliation:
Chemistry Division, Argonne National Laboratory, Argonne, IL
O. Auciello
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL
Get access

Abstract

To realize Gigabit density ferroelectric memory devices, downscaling issues involving processing, materials, and fundamental ferroelectric behavior must be resolved. To address patterning and characterizing ferroelectric films at the nanoscale, we have prepared different lateral sizes of ferroelectric PZT capacitors down to 120 nm, using direct-write electron beam lithography. Characterization of the piezoelectric activity of the patterned elements was performed by means of piezoelectric-sensitive scanning probe microscope in the contact mode. Switching of single 120 nm cells was achieved.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below.

References

1. Auciello, O., Scott, J. F., and Ramesh, R., Phys. Today 51, 22 (1998).CrossRefGoogle Scholar
2. Okamura, S., Mori, K., Tsukamoto, T., and Shiosaki, T., Integr. Ferroelectr. 18, 311 (1997).CrossRefGoogle Scholar
3. Alexe, M., Harnagea, C., Hesse, D., and Gösele, U., Appl. Phys. Lett. 75, 1793 (1999).CrossRefGoogle Scholar
4. Stanishevski, A., Aggarwal, S., Prakash, A. S., Melngailis, J., and Ramesh, R., J. Vac. Sci. Technol. B 16, 3899 (1998).CrossRefGoogle Scholar
5. Bühlmann, S., Dwir, B., Baborowski, J., and Muralt, P., Appl. Phys. Lett. 80, 3195 (2002).CrossRefGoogle Scholar
6. Alexe, M., Gruverman, A., Harnagea, C., Zakharov, N. D., Pignolet, A., Hesse, D., and Scott, J. F., Appl. Phys. Lett. 75, 1158 (1999).CrossRefGoogle Scholar
7. Chen, S. –Y. and Chen, I.-W., J. Am. Ceram. Soc. 81, 97 (1998).CrossRefGoogle Scholar
8. Alexe, M., Harnagea, C., Hesse, D., and Gösele, U., Appl. Phys. Lett. 79, 242 (2001).CrossRefGoogle Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Submicron Ferroelectric Elements Fabricated by Direct Electron Beam Lithography
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Submicron Ferroelectric Elements Fabricated by Direct Electron Beam Lithography
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Submicron Ferroelectric Elements Fabricated by Direct Electron Beam Lithography
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *