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Study of Ion Beam Mixing by x ray reflectometry

Published online by Cambridge University Press:  15 March 2011

D Simeone
Affiliation:
CEA/DEN/DANS/DMN/SRMA/LA2M-MFE, CEA-CNRS-ECP, CE Saclay, Gif sur Yvette, 91191, France CNRS/ECP/SPMS-MFE, CEA-CNRS-ECP, SPMS, ECP, Chatenay-Malabry, 92292, France
D Gosset
Affiliation:
CEA/DEN/DANS/DMN/SRMA/LA2M-MFE, CEA-CNRS-ECP, CE Saclay, Gif sur Yvette, 91191, France CNRS/ECP/SPMS-MFE, CEA-CNRS-ECP, SPMS, ECP, Chatenay-Malabry, 92292, France
L. Luneville
Affiliation:
CEA/DEN/DANS/DM2S/SERMA/LLPR-MFE, CEA-CNRS-ECP, CE Saclay, Gif sur Yvette, 91191, France CNRS/ECP/SPMS-MFE, CEA-CNRS-ECP, SPMS, ECP, Chatenay-Malabry, 92292, France
G Baldinozzi
Affiliation:
CEA/DEN/DANS/DMN/SRMA/LA2M-MFE, CEA-CNRS-ECP, CE Saclay, Gif sur Yvette, 91191, France CNRS/ECP/SPMS-MFE, CEA-CNRS-ECP, SPMS, ECP, Chatenay-Malabry, 92292, France
N Moncoffre
Affiliation:
Université de Lyon, Université Lyon 1, CNRS/IN2P3, UMR5822, Institut de Physique Nucléaire de Lyon (IPNL), 4 rue Enrico Fermi, F-69622 Villeurbanne cedex, France
C. Deranlot
Affiliation:
Unité Mixte de Physique CNRS/Thales, Campus de Polytechnique, 1 Avenue A. Fresnel, 91767 Palaiseau Cedex, France and Université Paris-Sud 11, 91405 Orsay, France
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Abstract

We present in this text a new experimental tool to study the mixing of atoms under irradiation. Based on physics of x ray diffraction, the specular reflectivy of x ray was used to estimate the Auto Correlation Function associated with the electron density gradient. The accuracy of the ACF is around 1 nanometer and does not evolve with the thickness of the probed layer. Thus, this point allows accurately measuring the broadening of the electron density gradient spreading induced by irradiation. Such an accurate profile extracted over a large range of fluences (about 3 decades) would lead to the determination of the functional dependence of this spreading with the fluence. This could allow pointing out the main mechanisms triggering the atomic mixing over large distances when atomic mixing occurring in thermal spikes is washed out.

Type
Articles
Copyright
Copyright © Materials Research Society 2011

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