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Structure and Ferroelectric Behaviour of Step-Crystallized PbZr0.5Ti0.5O3 Thin Films Prepared by Electron Beam Evaporation of Multi-Component Oxides

Published online by Cambridge University Press:  15 February 2011

Shaban R. Darvish
National Physical Laboratory, Dr. K.S. Krishnan Marg, New Delhi 110 012, India
A.C. Rastogi
National Physical Laboratory, Dr. K.S. Krishnan Marg, New Delhi 110 012, India
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Preparation of ferroelectric lead zirconate titanate (PZT) thin film by electron beam evaporation of multicomponent oxides followed by a post-deposition synthesis of PZT films by step-annealing under O2 ambient is described. Incipient formation of Pb3O4-ZrO2-PbTiO3 solid solution by a 600°C annealing is required for crystallization of PZT phase. Two morphotropic phase boundary reactions between solid solution phase with TiO2 and PbTiO3 with ZrO2 are proposed for PZT growth. Polarization and capacitance-voltage hysteresis data are presented to establish ferroelectric behaviour.

Research Article
Copyright © Materials Research Society 1995

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