Article contents
Stress and Microstructure in Rf-Diode and Dc-Magnetron Sputtered Beryllium Thin Films
Published online by Cambridge University Press: 22 February 2011
Abstract
The effect of deposition parameters on the properties of sputtered Be films has been studied. The parameters have been optimized to obtain stress free films. Nitrogen pulsing has been used to improve the film microstructure by suppressing the columnar grain growth.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1992
References
REFERENCES
- 1
- Cited by