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Silica Nanosphere Lithography Defined Light Trapping Structures for Ultra-thin Si Photovoltaics

Published online by Cambridge University Press:  01 June 2015

Natasa Vulic ,
Jea-Young Choi ,
Christiana B. Honsberg  and
Stephen M. Goodnick
Natasa Vulic
Affiliation:
School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287, U.S.A.
Jea-Young Choi
Affiliation:
School for Engineering of Matter, Transport and Energy, Arizona State University, Tempe, AZ 85287, U.S.A.
Christiana B. Honsberg
Affiliation:
School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287, U.S.A.
Stephen M. Goodnick
Affiliation:
School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287, U.S.A.
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Abstract

Periodic arrays of low-aspect ratio silicon nanopillars strongly reduce front surface reflection over a broad wavelength range. In this study, we numerically simulate the reflection of light for thick crystalline silicon substrates nanostructured through a combination of silica nanosphere lithography (SNL) and metal-assisted chemical etching (MaCE), producing ordered arrays of nanopillars with hexagonal periodicity. Using statistical methods, we show that the simulated measurements are in good agreement with the spectrophotometry measurements of the fabricated nanopillars.

Keywords

simulationSinanostructure
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1770: Symposium A – Emerging Silicon Science and Technology , 2015 , pp. 31 - 36
Copyright
Copyright © Materials Research Society 2015 

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References

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