Scanning Spreading Resistance Microscopy For 3D-Carrier Profiling in FinFET-based Structures
Published online by Cambridge University Press: 01 February 2011
Junction formation in FinFET-based 3D-devices is a challenging problem as one targets a complete conformal doping of the source/drain regions in order to produce equal gate-profile overlaps (and thus transistor behavior) on all sides of the fins. Due to the lack of predictive modeling for several of the doping strategies explored (plasma immersion, cluster implants, vapor phase deposition, etc…) it becomes difficult to correctly predict the performance of the devices and hence, accurate 3D-doping profile determination is desired. Although several dopant/carrier profiling methods exist with excellent one- or two-dimensional resolution and properties, there is an urgent need to extend these towards a quantitative three-dimensional geometry. In this work, we use scanning spreading resistance microscopy (SSRM) with dedicated FinFET test structure to obtain three-dimensional information from successive two-dimensional scanning spreading resistance maps. We also assess the validity of our methodology by comparing various sections along the fins which represent the variability due to the processing and measurement procedure.
- Research Article
- MRS Online Proceedings Library (OPL) , Volume 1070: Symposium E – Doping Engineering for Front-End Processing , 2008 , 1070-E01-11
- Copyright © Materials Research Society 2008