Skip to main content Accessibility help
×
Home
Hostname: page-component-6c8bd87754-dzvvk Total loading time: 0.149 Render date: 2022-01-16T11:37:45.048Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true, "newUsageEvents": true }

The Role of Sputter Pressure in Influencing Electrical and Optical Properties of ITO on Glass

Published online by Cambridge University Press:  01 February 2011

Shereen Elhalawaty
Affiliation:
selhalaw@asu.edu, Arizona State University, School of Materials, Tempe, Arizona, United States
Karthik Sivaramakrishnan
Affiliation:
s.karthik@asu.edu, Arizona State University, Tempe, Arizona, United States
Theodore David
Affiliation:
David.Theodore@freescale.com, Freescale Semiconductor Inc, Tempe, Arizona, United States
Terry L Alford
Affiliation:
TA@asu.edu, Arizona State University, 1711 S Rural Rd, ERC 252, Tempe, 85281, United States
Get access

Abstract

Thin layers of indium tin oxide (ITO) were deposited onto glass substrates by RF magnetron sputtering with the pressure varying from 6 mTorr to 15 mTorr. The films were annealed in a reducing atmosphere at 500 °C for 30 minutes. Sheet resistance was determined by four-point-probe measurement. Resistivity, mobility, and carrier concentration were obtained by Hall effect measurements. Transmission of the films in the visible spectrum was determined by photospectrometry. The structure of the films was characterized by X-ray diffraction. X-ray photoelectron spectroscopy was used to determine the oxidation state of Sn, which was used to determine the fraction of active tin clusters. The effect of additional anneals was investigated. The results reveal that the lowest resistivity obtained was 1.69×10-4 -cm at 9 mTorr and the highest transmittance of 90% was obtained after a second anneal. However, the second anneal decreased the mobility and conductivity for high sputter pressures.

Type
Research Article
Copyright
Copyright © Materials Research Society 2010

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Kim, H. Gilmore, C. M. Pique, A. Horwitz, J. S. Mattoussi, H. Murata, H. Kafafi, Z. H. and Chrisey, D. B. J. Appl. Phys. 86, 6451 (1999).10.1063/1.371708CrossRefGoogle Scholar
2 Fan, J. C. C. and Goodenough, J. B. J. Appl. Phys. 48, 3524 (1977).CrossRefGoogle Scholar
3 Tahar, R. B. Ban, T. Ohya, Y. and Takahashi, Y. J. Appl. Phys. 83, 2631 (1998).CrossRefGoogle Scholar
4 Chopra, K. L. Major, S. and Pandya, D. K. Thin Solid Films 102, 1 (1983).CrossRefGoogle Scholar
5 Danson, N. Safi, I. Hall, G. W. Howson, R. P. Surf. Coat. Technol. 99, 147 (1998).10.1016/S0257-8972(97)00436-2CrossRefGoogle Scholar
6 Yamaguchi, M. Ektessabi, A. Nomura, H. Yasui, N. Thin Solid Films 447, 115 (2004).10.1016/j.tsf.2003.09.033CrossRefGoogle Scholar
7 Kim, D. Kim, S. Surf. Coat. Technol. 154, 204 (2002).CrossRefGoogle Scholar
8 Kim, D. Kim, S. Surf. Coat. Technol. 157, 66 (2003).CrossRefGoogle Scholar
9 Kim, H. Pique, A. Horwitz, J. S. Mattoussi, H. Murata, H. Kafafi, Z. H. and Chrisey, D. B. J. Appl. Phys. Lett. 74, 3444 (1999).CrossRefGoogle Scholar
10 Zheng, J. P. and Kwok, H. S. Appl. Phys. Lett. 639, 1 (1993).CrossRefGoogle Scholar
11 Betz, U. Olsson, M. K. Marthy, J. Escola, M. F. Atamny, F. Surf. Coat. Technol. 200, 5751 (2006).10.1016/j.surfcoat.2005.08.144CrossRefGoogle Scholar
12 Doolittle, L. R. Nucl. Instrum. Methods Phys. Res. B 9, 344 (1985).CrossRefGoogle Scholar
13 Han, H. Mayer, J. W. and Alford, T. L. J. Appl. Phys. 99, 123711 (2006).10.1063/1.2204815CrossRefGoogle Scholar
14 Hartnagel, H. L. Dawar, A. L. Jain, A. K. and Jagadish, C. Semiconducting Transparent Thin Films (Institute of Physics, Philadelphia, 1995).Google Scholar
15 Noguchi, S. and Sakata, H. J. Phys. D 13, 1129 (1980).Google Scholar
16 Han, H. Mayer, J. W. and Alford, T. L. J. Appl. Phys. 98, 083705 (2005).10.1063/1.2106013CrossRefGoogle Scholar
17 Han, H. Zoo, Y. Bhagat, S. K. Lewis, J. S. and Alford, T. L. J. Appl. Phys. 102, 063710 (2007).10.1063/1.2783952CrossRefGoogle Scholar
18 Moulder, J. F., Stickle, W. F. and Sobol, P. E. Handbook of X-Ray Photoelectron Spectroscopy (Physical Electronics, Minnesota, 1995).Google Scholar
19 , Frank and Köstlin, H., Appl. Phys. A: Solids Surf. 27, 197 (1982).CrossRefGoogle Scholar
20 Yamomoto, S. Yamanaka, T. and Ueda, Z. J. Vac. Sci. Technol. A 5, 1952 (1987).CrossRefGoogle Scholar
21 Han, H. Mayer, J. W. and Alford, T. L. J. Appl. Phys. 100, 083715 (2006).CrossRefGoogle Scholar
22 Kim, H. Horwitz, J. S. Kushto, G. Pique, A. Kafafi, Z. H. Gilmore, C. M. and Chrisey, B. D. J. Appl. Phys. 88, 6021 (1998).CrossRefGoogle Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

The Role of Sputter Pressure in Influencing Electrical and Optical Properties of ITO on Glass
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

The Role of Sputter Pressure in Influencing Electrical and Optical Properties of ITO on Glass
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

The Role of Sputter Pressure in Influencing Electrical and Optical Properties of ITO on Glass
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *