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Relaxation of a Strained Elastic Film on a Viscous Layer

Published online by Cambridge University Press:  21 March 2011

R. Huang ,
H. Yin ,
J. Liang ,
K. D. Hobart ,
J. C. Sturm  and
Z. Suo
R. Huang
Affiliation:
Department of Civil and Environmental Engineering, Princeton University, Princeton, NJ 08544
H. Yin
Affiliation:
Department of Electrical Engineering and Center for Photonics & Optoelectronic Materials, Princeton University, Princeton, NJ 08544
J. Liang
Affiliation:
Department of Mechanical & Aerospace Engineering and Princeton Materials Institute, Princeton University, Princeton, NJ 08544
K. D. Hobart
Affiliation:
Naval Research Laboratory, Washington, DC 20375
J. C. Sturm
Affiliation:
Department of Electrical Engineering and Center for Photonics & Optoelectronic Materials, Princeton University, Princeton, NJ 08544
Z. Suo
Affiliation:
Department of Mechanical & Aerospace Engineering and Princeton Materials Institute, Princeton University, Princeton, NJ 08544
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Abstract

Experiments were conducted with SiGe film islands on a layer of borophosphorosilicate glass (BPSG). Initially the SiGe is under compression. Upon annealing, the glass flows and the SiGe islands relax by both inplane expansion and wrinkling. This paper provides a two-dimensional (2D) model for inplane expansion. The results from the model are compared with the experiments with small SiGe islands. The effect of winkling, which is ignored in the present model, is discussed qualitatively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L3.14.1
Copyright
Copyright © Materials Research Society 2002

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References

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