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Rapid Growth of Ceramic Films by Particle-Vapor Codeposition
Published online by Cambridge University Press: 15 February 2011
Abstract
Particle-enhanced chemical vapor deposition (PECVD) is capable of producing ceramic films at high deposition rates. A mathematical model of the particle-vapor codeposition process has been developed and has been applied to PECVD processes to predict deposition rate enhancements and deposit properties.
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- Copyright © Materials Research Society 1992